HISTORY
Established in 1962 in Orange County, California, Thermco Systems is the original pioneer of diffusion furnaces.
With over 60 years of experience, Thermco has the largest installed base of horizontal diffusion furnaces in the world.
Expanding rapidly, our growth is now supported by manufacturing facilities in our UK headquarters, US and China. We now look after 400 major customers worldwide.
Generation 2 control released
2020
Proprietary 300mm fast cool element design
2019
PCMUX VTR700 ex shipped
2018
Acquires CSD Epitaxy Inc – Epitaxy reactors
2018
VTR PCMUX control system released
2017
Thermco acquires Protemp China
2015
Ultra-high vacuum 100% H2 anneal released
2014
Added T-Clean Chemical Wet Benches
2014
Forms T-Clean Divison
2013
Nanocat tool shipped
2012
Thermco opened 200mm demo lab
2010
First 200mm fully automated back-to-back system
2009
SPC module for the PCMUX released
2007
PCMUX control system released
2006
Tetreon acquires Thermco brand and recommences design and manufacturing in the UK
2004
Tetreon Technologies founded
2003
ASML Acquires SVG
2001
SVG Acquires Thermco
1988
5-6” Wafer Processing Capability
1982
Modern Control Systems
1981
First fully-automated systems shipped
1979
First HTR LPCVD
1976
First Computer Controlled HTR
1975
TEL/Thermco joint venture established
1971
First systems shipped
1963
Founded in Orange County, California
1962
