OUR HISTORY
Established in 1962 in Orange County, California, Thermco Systems is the original pioneer of diffusion furnaces. With over 55 years of experience, Thermco has the largest installed base of horizontal diffusion furnaces in the world. Expanding rapidly, our growth is now supported by manufacturing facilities in our UK headquarters, US and China. We now look after 400 major customers worldwide.
Founded in Orange County, California
1962
First systems shipped
1963
TEL/Thermco joint venture established
1971
First Computer Controlled HTR
1975
First HTR LPCVD
1976
First fully-automated systems shipped
1979
Modern Control Systems
1981
5-6” Wafer Processing Capability
1982
SVG Acquires Thermco
1988
ASML Acquires SVG
2001
Tetreon Technologies founded
2003
Tetreon acquires Thermco brand and recommences design and manufacturing in the UK
2004
PCMUX control system released
2006
SPC module for the PCMUX released
2007
First 200mm fully automated back-to-back system
2009
Thermco opened 200mm demo lab
2010
Nanocat tool shipped
2012
Forms T-Clean Divison
2013
Added T-Clean Chemical Wet Benches
2014
Ultra-high vacuum 100% H2 anneal released
2014
Thermco acquires Protemp China
2015
VTR PCMUX control system released
2017
Acquires CSD Epitaxy Inc – Epitaxy reactors
2018
PCMUX VTR700 ex shipped
2018
Proprietary 300mm fast cool element design
2019
Generation 2 control released
2020
MARKET LEADERS FOR HORIZONTAL FURNACES
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