Spares and support services

Thermco recommends using only original spare parts to guarantee the safety, reliability, and efficiency of our systems. 


We offer a comprehensive portfolio of consumable and non-consumable spare parts and can supply specifically compiled spare parts packages for our Diffusion furnaces, Wet benches, and Epi systems.

As part of our continuous improvement program, we have introduced Thermco TMX Gen II TMX PCBs to overcome obsolescence issues, these are fully backwards compatible and are plug-and-play installation, offer improved system performance and enhanced reliability and are RoHS compliant.

Thermco maintains a large inventory of parts available for all our equipment both current and obsolete. Parts can be shipped worldwide, and we hold stock in both our Chinese and US divisions to ensure our customers are supported quickly and efficiently.

If you need assistance with your requirements, please contact our team who will be able to support you.