DATA INTELLIGENCE USING REACTIVE AI

DIFFUSION & LPCVD FURNACES

Thermco Systems is recognised as the world’s leading supplier of horizontal LPCVD and Diffusion furnaces. Built on a proven platform with an intelligent control system, providing exceptional process performance with improved productivity. Offering our customers solutions for over 50 years

  • Largest installed base worldwide with lowest CoO and highest MTBF.
  • Continuous improvement offering customers next generation solutions.
  • Comprehensive product range from R&D laboratory systems to high volume production tools.
  • Supported substrates 50mm to 300mm.
  • Extensive global support network.
  • Computer control system enabling Data Intelligence with Reactive-AI.
  • Run to run analysis ensuring consistent process performance.
  • SPC with predictive maintenance enhancing uptime.
  • Fully automated solutions with cassette-to-cassette transfer & back-to-back loading.

Thermco Systems have thermal process tools designed with your emerging technologies in mind