DIFFUSION FURNACES & LPCVD FURNACES
DATA INTELLIGENCE USING REACTIVE
Thermco Systems is recognised as the world’s leading supplier of horizontal LPCVD and Diffusion furnaces. Built on a proven platform with an intelligent control system, providing exceptional process performance with improved productivity. Offering our customers solutions for over 50 years
- Largest installed base worldwide with lowest CoO and highest MTBF.
- Continuous improvement offering customers next generation solutions.
- Comprehensive product range from R&D laboratory systems to high volume production tools.
- Supported substrates 50mm to 300mm.
- Extensive global support network.
- Computer control system enabling Data Intelligence with Reactive-AI.
- Run to run analysis ensuring consistent process performance.
- SPC with predictive maintenance enhancing uptime.
- Fully automated solutions with cassette-to-cassette transfer & back-to-back loading.
