PYROMETER UPGRADE PRECISE TEMPERATURE MEASUREMENTS FOR OPTIMAL PROCESS MANAGEMENT
Process uniformity and repeatability depend on precise temperature measurements to manage the heating of wafers during the epitaxy deposition process. Properly functioning pyrometers are critical instruments for measuring the temperature and providing feedback to the heating power management algorithms.
The EpiPro 5000 systems are well known in the epitaxy market for their process control and flexible process capabilities that allows for simplified recipe management and excellent thickness and resistivity results. Temperature accuracy is critical in achieving this.
BENEFITS OF PYROMETER UPGRADES:
Systems are upgraded to the most advanced versions of pyrometer and logic available
Pyrometers that are obsolete pose a costly risk if they fail
A scheduled upgrade will avoid unscheduled downtime when a pyrometer replacement is required
Repeatable batch-to-batch temperature measurements enhances production output
THERMCO-EPITAXY Service personnel have the experience required to upgrade the hardware and logic and to verify optimal performance
Thermco Systems have thermal process tools designed with your emerging technologies in mind
The Product
When the pyrometer must be replaced, THERMCO-EPITAXY offers a single-range thermometer that senses the heat sign al from the susceptor at 1um wavelength. The operating range is 600-300°C. This pyrometer can replace previous pyrometer generations on all EpiPro 5000 series tools.
History
EpiPro 5000 systems were originally shipped from the factory with two types of pyrometers:
- Single-range thermometer (Land)
- Dual-range thermometer (Land, Raytek/Fluke)
Systems shipped in 2008 and earlier were equipped with dual-range thermometers, and after 2008 with the single-range thermometer. The algorithms in the control software that manage closed-loop heating system have been optimised to give the same performance in both versions for the required temperature range.
The Product
To replace your therometer, it is necessary to determine your current thermometer configuration. Contact THERMCO-EPITAXY Spares Group to verify which thermometer was was shipped with your tool.
- If your system has a single-range
- Raytek/Fluke Pyrometr, then it is a direct replacement (plug and play).
- If your system has a single-range Land pyrometer, then the pyromters in both R1 and R2 must be upgraded to single-range thermometers and the system logic updated on your system by the THERMCO-EPITAXY Servive Group.
- If your system has dual-range Land pyrometer, then the pyrometres in both R1 and R2 must be updated to single-range pyrometers and the system logic updated on your system by the THERMOCO-EPITAXY Service Group.
Contact Us
To upgrade or replace your pyrometer, contact Thermco Epitaxy at sa***@th*************.com
