Thermco Systems Limited acquires CSD Epitaxy, Freemont CA
The acquisition is part of Thermco’s longer-term strategy to extend its global footprint and the capabilities it can now provide to its global customer base throughout the UK, Europe, USA and China. Customers can now benefit from a wider range of semiconductor manufacturing solutions.
CSD Epitaxy continues the Gemini legacy of providing robust production equipment and excellent customer service.
Epi Pro – Product Advantages
High Process Flexibility
- Substrate diameters from 100 to 200mm
- Wide EPI Layer thickness from < 5 μm to >100 μm
- EPI Layer Resistivity from 0.02 Ωcm to > 50 Ωcm
- Dual process chamber system with high throughput
- Low Cost of Ownership
- Sharp dopant transitions due to unique dopant injection system
Wafers x dia: 35 x 100mm, 24 x 125mm, 18 x 150mm, 8 x 200mm
Industry Leading Productivity
Large batch sizes and dual station design provide high throughput
Reduced space requirements and high throughput reduces cost per wafer
Low consumable cost and ease of maintenance reduce CoO
World Class Support
Worldwide service and spares support
